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Electronic Substrates

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Advanced Abrasives for Electronic Substrate Processing

Electronic substrates are foundational components in modern electronic packaging. From ceramic-based circuits to semiconductor interposers, surface precision and cleanliness are critical to performance. Our silicon carbide and alumina abrasives are engineered to deliver controlled material removal and submicron-level smoothness for materials like alumina, aluminum nitride (AlN), silicon nitride (Si₃N₄), and glass ceramics.

Key Applications in Substrate Fabrication

1

Ceramic Substrate Lapping

Silicon carbide and white fused alumina deliver flatness control and minimal surface damage on Al₂O₃, AlN, and Si₃N₄ substrates.

2

Glass Interposer Edge Finishing

Fine abrasives prevent micro-chipping and delamination during edge trimming of glass-based substrates.

3

Via Surface Conditioning

Alumina abrasives remove smear and prepare ceramic via holes for reliable metallization.

4

Metal Layer Pre-Bond Cleaning

Micro-polishing with high-purity abrasives improves adhesion of Cu or Ag metallization layers.

5

Backgrinding for Wafer-Level Packaging

Precision abrasive slurries enable ultra-thin silicon or ceramic substrate reduction while maintaining structural integrity.

6

Protective Coating Removal

Selective abrasive systems help remove temporary surface layers without scratching the underlying substrate.

Electronic Substrate Abrasive Specifications

Material Grit Size Range Application Purity Key Characteristics
Green Silicon Carbide F400–F1200 Ceramic lapping, thin wafer prep ≥99.5% High hardness, precise removal
White Fused Alumina F600–F1200 Surface prep, metallization cleaning ≥99.0% Low contamination, high polish
Calcined Alumina 0.3μm–5μm Polishing, glass edge smoothing ≥99.9% Controlled PSD, minimal scratches

Performance Comparison

Property Green SiC White Fused Alumina Calcined Alumina
Hardness 9.5 Mohs 9.0 Mohs 8.8 Mohs
Surface Finish Fine Very Fine Ultra-Fine
Impurity Risk Low Very Low Extremely Low
Compatibility with Ceramics Excellent Good Excellent

Case Study: AlN Substrate Lapping

Client: Advanced substrate manufacturer for power electronics

Challenge: Improve flatness and surface roughness of AlN substrates for multilayer packaging

Solution: Implemented multi-step SiC and alumina process using 3μm calcined alumina slurry for final polish

  • Achieved Ra < 0.25μm
  • Improved bonding yield by 12%
  • Reduced scrap rate by 27%

Technical Support & Customization

  • Custom Slurry Formulation: Tailored for AlN, alumina, quartz, and glass ceramics
  • Lot Traceability: Full COA and ICP analysis provided per batch
  • Tool Compatibility: Suitable for planetary polishers, CMP, and manual lapping
  • Technical Services: Process audits, integration trials, and cleaning guidelines

Frequently Asked Questions

What abrasives are best for ceramic substrates?

Green SiC and calcined alumina are ideal for AlN, Al₂O₃, and Si₃N₄ substrates due to their hardness, purity, and ability to achieve uniform finish without subsurface damage.

Can I use these abrasives in CMP processes?

Yes. We provide CMP-compatible abrasive slurries with stable suspension characteristics, narrow PSD, and minimal agglomeration.

Are your abrasives safe for microelectronic assembly?

Absolutely. Our ultra-pure abrasives undergo third-party analysis and are free from conductive impurities, ensuring safety in microelectronics and packaging lines.

Request Substrate Polishing Samples

Looking to improve your substrate process yield or surface uniformity? Contact our materials engineering team for tailored recommendations and sample delivery.

Request Samples