Innovative Techniques for Silicon Carbide SiC Substrate Polishing
Silicon carbide (SiC), an emerging semiconductor material, is known for its high thermal conductivity, wide bandgap, high breakdown field, and high electron mobility. These properties make it one of the most researched semiconductor materials. Due to these characteristics, silicon carbide has widespread applications in substrates, epitaxy, device design, wafer fabrication, and more.
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